| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus capable of treating PFC gas and the like.SOLUTION: A treatment apparatus is provided that includes a catalyst layer allowing a gas to be treated to pass therethrough and a voltage supply unit applying a bias voltage to the catalyst layer. The treatment apparatus may have an irradiation unit that irradiates ultraviolet rays to the gas to be treated. The irradiation unit is desirably provided with a source of vacuum ultraviolet rays. The catalyst layer has a porous structure, is typically a honeycomb-structured platinum catalyst, and desirably includes a layer filled with granular hydrated lime therein. |
