| 摘要 |
PROBLEM TO BE SOLVED: To provide a capacitor of a small capacitance fluctuation by suppressing moisture absorption of the capacitor of an MIM structure, a semiconductor device, and manufacturing method of the capacitor. ! SOLUTION: The capacitor used for a semiconductor device includes: a lower part electrode layer; a dielectric layer formed on the lower part electrode layer; an upper part electrode layer formed on the dielectric layer; a sidewall protective layer being in contact with a side wall of the dielectric layer and a side wall of the upper part electrode layer; and a waterproof insulator film for covering the lower part electrode layer, the dielectric layer, the upper part electrode layer, and the sidewall protective layer. ! COPYRIGHT: (C)2015,JPO&INPIT |
