| 摘要 |
This invention provides a method for manufacturing a metal-oxide film and an application therefor. Said method has a precursor-film formation step in which a solution containing a solvent and at least one metal component, namely iridium, is applied to a substrate to form a metal-oxide precursor film and a conversion step in which, with the metal-oxide precursor film heated, said metal-oxide precursor film is converted to a metal-oxide film by exposure to ultraviolet light in an atmosphere that has an oxygen concentration of no more than 80,000 ppm. |
