发明名称 |
VARIABLE THICKNESS DIAPHRAGM FOR A WIDEBAND ROBUST PIEZOELECTRIC MICROMACHINED ULTRASONIC TRANSDUCER (PMUT) |
摘要 |
A diaphragm for a piezoelectric micromachined ultrasonic transducer (PMUT) is presented having resonance frequency and bandwidth characteristics which are decoupled from one another into independent variables. Portions of at least the piezoelectric material layer and backside electrode layer are removed in a selected pattern to form structures, such as ribs, in the diaphragm which retains stiffness while reducing overall mass. The patterned structure can be formed by additive, or subtractive, fabrication processes. |
申请公布号 |
WO2015131083(A1) |
申请公布日期 |
2015.09.03 |
申请号 |
WO2015US18076 |
申请日期 |
2015.02.27 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
BOSER, BERNHARD;HORSLEY, DAVID;PRZYBYLA, RICHARD;ROZEN, OFER;SHELTON, STEFON |
分类号 |
B60B1/06 |
主分类号 |
B60B1/06 |
代理机构 |
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代理人 |
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