| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic device manufacturing method which can keep high reliability of an oscillator and form a cavity for storing the oscillator in a small size and with high accuracy. ! SOLUTION: An electronic device manufacturing method comprises: a process of forming a first semiconductor layer on a substrate 10 and patterning the first semiconductor layer to form a bottom electrode 22 of an oscillator 20; a process of forming a first layer on a surface of the bottom electrode; a process of forming a second semiconductor layer on the substrate and bottom electrode, and patterning the second semiconductor layer to form an upper electrode 24 of the oscillator; a process of etching the first layer to form the bottom electrode and the upper electrode to be arranged at a distance from each other; a process of forming a second layer on the bottom electrode and upper electrode; a process of forming in the second layer, a side wall which surrounds the oscillator in a planar view; a proc |
