发明名称 PHOTOCURABLE COMPOSITIONS
摘要 A photocurable composition comprising a photoresist component, and a perfluoropolyether silane is disclosed. The composition enables easier release of phototool from a photoresist.
申请公布号 US2015248055(A1) 申请公布日期 2015.09.03
申请号 US201314409162 申请日期 2013.08.06
申请人 3M INNOVATIVE PROPERTIES COMPANY 发明人 Fall Douglas C.;Qiu Zai-Ming
分类号 G03F7/075 主分类号 G03F7/075
代理机构 代理人
主权项 1. A photocurable composition comprising: a) a photoresist component, and b) a perfluoropolyether silane of the formula: (RPFPE—X1—CO—NH)x—R1—(NH—CO—X2—RSilyl)y,whereRPFPE represents a perfluoropolyether group,X1 and X2 are independently —O—, —S— or —NR2— where R2 is H or C1-C4 alkyl,R1 is a residue of a polyisocyanate,RSilyl is a silane group-containing moiety,subscripts x and y are each independently 1 to 6, and c) a photoinitiator.
地址 St. Paul MN US