发明名称 PURGING APPARATUS AND PURGING METHOD
摘要 A container is mounted at a predetermined position in a purging apparatus so as to prevent the container from being caught by a nozzle. When the container is lowered and mounted in the purging apparatus, two facing sides at the front edge of the bottom surface of the container and at the front edge of a recess portion and two facing sides on both right and left side edges of the bottom surface of the container are guided using a front portion guide, a side portion guide, and a center guide. Next, the nozzle is brought into contact with the bottom surface of the container.
申请公布号 WO2015129122(A1) 申请公布日期 2015.09.03
申请号 WO2014JP81944 申请日期 2014.12.03
申请人 MURATA MACHINERY, LTD. 发明人 MURATA MASANAO;YAMAJI TAKASHI
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
主权项
地址