发明名称 PHOTOSENSITIVE RESIN COMPOSITION
摘要 A photosensitive resin composition containing (A), (B), (C), and (D), the amount of (A) being 45-80% by mass in relation to the total amount of (A) and (C): (A) a polymer that contains a structural unit derived from an aromatic carboxylic acid having an ethylenically unsaturated bond and a structural unit derived from an unsaturated compound having a C2-4 cyclic ether structure, said polymer having no structural units that have a C4-6 perfluoroalkyl group; (B) a polymer containing structural unit that has a C4-6 perfluoroalkyl group; (C) a polymeric compound; and (D) a polymerization initiator.
申请公布号 WO2015129059(A1) 申请公布日期 2015.09.03
申请号 WO2014JP65661 申请日期 2014.06.06
申请人 SUMITOMO CHEMICAL COMPANY, LIMITED 发明人 KAWANISHI, YUTAKA;INOUE, HIROYASU;YAMASHITA, KAZUKI
分类号 G03F7/033;G03F7/031 主分类号 G03F7/033
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