| 发明名称 |
LASER CHAMBER AND DISCHARGE EXCITATION GAS LASER APPARATUS |
| 摘要 |
There is provided a laser chamber housing a pair of discharge electrodes and a gas circulation fun, the laser chamber including: a magnetic bearing configured to support a shaft of the gas circulation fan, with the shaft being in non-contact with the magnetic bearing; and a touchdown bearing configured to operate as a bearing when the magnetic bearing is uncontrollable, the touchdown bearing being provided with solid lubricant configured of one or more of an Au plating layer, a Ni-containing plating layer, and a Cu plating layer. |
| 申请公布号 |
US2015249312(A1) |
申请公布日期 |
2015.09.03 |
| 申请号 |
US201514694743 |
申请日期 |
2015.04.23 |
| 申请人 |
GIGAPHOTON INC. |
发明人 |
TSUSHIMA Hiroaki;MIZOGUCHI Hakaru;FUJIMOTO Junichi;NAKARAI Hiroaki;SUZUKI Natsushi |
| 分类号 |
H01S3/036;H01S3/097;H01S3/223;H01S3/038;H01S3/225 |
主分类号 |
H01S3/036 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A laser chamber housing a pair of discharge electrodes and a gas circulation fan, the laser chamber comprising:
a magnetic bearing configured to support a shaft of the gas circulation fan, with the shaft being in non-contact with the magnetic bearing; and a touchdown bearing configured to operate as a bearing when the magnetic bearing is uncontrollable, the touchdown bearing being provided with solid lubricant configured of one or more of an Au plating layer, a Ni-containing plating layer, and a Cu plating layer. |
| 地址 |
Oyama-shi JP |
