BATCH FABRICATION METHOD OF THREE-DIMENSIONAL PHOTONIC MICROSTRUCTURES

摘要

Provided is a batch fabrication method of three-dimensional photonic microstructures including a support structure fabricating step, a variable structure fabricating step, a thermal reflow step, and a three-dimensional photonic microstructure forming step. The batch fabrication method of three-dimensional photonic microstructures fabricates three-dimensional photonic microstructures having several shapes depending on a demand of a user through these steps.

主权项

1. A batch fabrication method of three-dimensional photonic microstructures, comprising:
a support structure fabricating step of disposing support structures protruding upwardly from a substrate on the substrate; a variable structure fabricating step of disposing variable structures on the substrate, the variable structures being made of a material of which a shape is changed by thermal reflow and being formed so as to partially contact the support structures; a thermal reflow step of applying heat to the substrate; and a three-dimensional photonic microstructure forming step of forming the three-dimensional photonic microstructures by changing the shapes of the variable structures by the thermal reflow step.