MICROELECTROMECHANICAL DEVICE WITH MOTION LIMITERS

摘要

A microelectromechanical device that comprises a first structural layer, and a movable mass suspended to a primary out- of plane motion relative the first structural layer. A cantilever motion limiter structure is etched into the movable mass, and a first stopper element is arranged on the first structural layer, opposite to the cantilever motion limiter structure. Improved mechanical robustness is achieved with optimal use of element space.