| 摘要 |
PROBLEM TO BE SOLVED: To enhance end face strength of a substrate when dividing a brittle material substrate after scribing, while extending a life of a scribing wheel.SOLUTION: Scribing-wheel base material that has the largest diameter in a central part of a side face of a disk periphery is used, and a diamond film is formed on the side face by a CVD method. The central part of the side face is polished so that a plane including a circle defined by a ridge line becomes perpendicular to a central axis of a scribing wheel. Thereby, roughness Ra of a ridge part can be reduced to 0.03 μ or less. When the scribing wheel is used for scribing and dividing a brittle material substrate, accuracy of an end face of the divided substrate increases and strength of the end face can be improved. Abrasion of a ridge part is small even if continuing scribing, to extend a life of the scribing wheel. |
