| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard film that is formed on a substrate surface of tools and is excellent in abrasion resistance and adhesion in cutting work or the like, and a forming method thereof.SOLUTION: A hard film 1 formed on a substrate 10 is composed of an A layer 4 having a composition of [Ti(BCN)] and a B layer 5 having a composition of any one of [TiAl(CN)], [AlCr(CN)], [TiCrAlSi(CN)], and [TiSi(CN)]. A base layer 2 composed of the B layer 5 is formed on the substrate 10 and an adhesion-promoted layer 3 laminated alternately and repeatedly with the A layer 4 and the B layer 5 is formed on the base layer 2. As the adhesion-promoted layer 3 gets thicker, the A layer 4 to be added gets thicker than the A layer 4 closer to the base layer 2 and reaches a maximum thickness of 20-50 nm. |
