POLYMER-CONTAINING COATING LIQUID APPLIED TO RESIST PATTERN

摘要

[Problem] To provide a coating liquid that is applied to a resist pattern and that is used in place of a conventional rinsing liquid. [Solution] A coating liquid applied to a resist pattern, the coating liquid comprising a polymer having a structural unit represented by formula (1), and a solvent including water and/or an alcohol. (In the formula, R1 represents a C1-12 organic group, and X represents an organic group represented by formula (2) (wherein R2 and R3 each independently represent a linear or branched C1-3 alkylene group; said R2 bonds with an oxygen atom in formula (1); R4 represents a C1-4 alkoxy group, an allyloxy group, or a hydroxy group; and p represents 0, 1, or 2).)