发明名称 DIRECTIONAL FINFET CAPACITOR STRUCTURES
摘要 A method for fabricating a capacitor within a FinFET device includes patterning a first gate interconnect material (138-1) having a first recess. The method also includes patterning a first trench interconnect material (132-1) coupled to the first gate interconnect material at the first recess to form a first plate of a FinFET capacitive structure.
申请公布号 WO2015131034(A1) 申请公布日期 2015.09.03
申请号 WO2015US17975 申请日期 2015.02.27
申请人 QUALCOMM INCORPORATED 发明人 CHUN, HONG
分类号 H01L49/02;H01L23/522;H01L27/06 主分类号 H01L49/02
代理机构 代理人
主权项
地址