| 摘要 |
PROBLEM TO BE SOLVED: To provide an X-ray inspection apparatus capable of accurately performing inspection on the basis of detection signals from a plurality of X-ray line sensors juxtaposed in a conveying direction of objects under inspection even when the objects under inspection have various heights.SOLUTION: An X-ray inspection apparatus 1 includes a timing delay unit 44 which delays detection timing of an X-ray line sensor 60 located on the downstream side relative to detection timing of an adjacent X-ray line sensor 50 on the upstream side. An object height measurement sensor 81 or input interface 47 acquires height of an object W under inspection through measurement or input. A delay time computation unit 45 uses the acquired height of the object W under inspection, positions of the X-ray line sensors 50, 60 and an X-ray generator 9, and conveying speed of the conveyor unit 2 to compute a delay time to be used by the timing delay unit 44 to match detection timing of the X-ray line sensors 50, 60 for detection of an internal portion of the object W under inspection determined from the acquired height of the object W under inspection. |
