| 摘要 |
PROBLEM TO BE SOLVED: To provide an eccentricity adjustment apparatus capable of performing highly accurate eccentricity quantity adjustment of a unit of several μm even when measurement frequency and positioning frequency are less.SOLUTION: The eccentricity adjustment apparatus includes: a scale disk pressing mechanism 6 which when adjusting eccentricity quantity of a scale disk 1 from a boss 2 in fixing of the scale disk 1 on the boss 2, presses the scale disk 1 on the opposite side to the side where the scale disk 1 is fixed on the boss 2; a mechanism for measuring the eccentricity quantity of the scale disk 1 from the boss 2 and an eccentric direction; and an adjustment head 11 arranged on a movable stage 13 to adjust the eccentricity quantity of the scale disk 1 by pressing the outside of the scale disk 1, in which load for pressing the scale disk 1 by the scale disk pressing mechanism 6 is set so that the scale disk 1 is not deviated from the boss 2 due to centrifugal force following the eccentricity of the scale disk 1. |
