| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable measurement method in which deterioration and destruction of a semiconductor chip under test are prevented. ! SOLUTION: A BIST circuit 3 for monitoring an input waveform is included in a semiconductor chip 8. During the execution of a DC contact test between pads and probe needles, the BIST circuit in the semiconductor chip determines AC waveform quality for each contact and returns a result of the determination to a tester. In addition, the BIST circuit has a power supply line different from that of an integrated circuit of an IC body and an individual control signal line separated from the operation of the IC body. In packaging, pads of them are wired to the ground so as not to operate. ! COPYRIGHT: (C)2015,JPO&INPIT |
