| 发明名称 |
ELECTROSTATIC ACTUATOR WITH SHORT CIRCUIT PROTECTION AND PROCESS |
| 摘要 |
An electrostatic actuator for a printhead. The electrostatic actuator may include a substrate. A dielectric layer may be disposed on the substrate. An electrode layer may be disposed on the dielectric layer. A first standoff layer may be disposed at least partially on the electrode layer. A second standoff layer may be disposed at least partially on the electrode layer and at least partially on the first standoff layer. A portion of the second standoff layer disposed on the electrode layer may be removed to form one or more landing pads. A membrane may be disposed at least partially on the second standoff layer. |
| 申请公布号 |
US2015246539(A1) |
申请公布日期 |
2015.09.03 |
| 申请号 |
US201414193631 |
申请日期 |
2014.02.28 |
| 申请人 |
XEROX CORPORATION |
发明人 |
Nystrom Peter J.;Cellura Mark A.;Redding Gary D.;Gulvin Peter M. |
| 分类号 |
B41J2/14;B41J2/16 |
主分类号 |
B41J2/14 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An electrostatic actuator for a printhead, comprising:
a substrate; a dielectric layer disposed on the substrate; an electrode layer disposed on the dielectric layer; a first standoff layer disposed at least partially on the electrode layer; a second standoff layer disposed at least partially on the electrode layer and at least partially on the first standoff layer, wherein a portion of the second standoff layer disposed on the electrode layer is removed to form one or more landing pads; and a membrane disposed at least partially on the second standoff layer. |
| 地址 |
NORWALK CT US |
