| 摘要 |
The purpose of the present invention is to provide an electrostatic actuator that is able to suppress deterioration in the driving force of a moving element when humidity is high or there are water droplets such as condensation. An electrostatic actuator (100) comprises: a stationary element (1) having a substrate (102) and electrodes (1a-1d) provided on the substrate; and a moving element (2) arranged on a surface of the stationary element, which includes the electrodes. The moving element has a resin substrate (2a) and a plurality of projecting bodies (104) provided to the stationary element side of the resin substrate. A surface of the stationary element that faces the plurality of projecting bodies is subjected to a water repellency treatment. |
