发明名称 多層配線基板、プローブカード及び多層配線基板の製造方法
摘要 A multilayer wiring substrate includes a substrate main body and a plurality of wiring lines. The substrate main body includes first and second main surfaces. The plurality of wiring lines extend from the first main surface toward the second main surface side in the substrate main body. The substrate main body includes a plurality of insulator layers laminated on each other. The wiring lines each include via conductors separately provided in the plurality of insulator layers. In at least one of the plurality of wiring lines, a diameter of the via conductor provided in a first insulator layer defining the first main surface of the substrate main body is smaller than a diameter of the via conductor provided in at least one of the plurality of insulator layers other than the first insulator layer.
申请公布号 JP5772970(B2) 申请公布日期 2015.09.02
申请号 JP20130539696 申请日期 2012.10.19
申请人 株式会社村田製作所 发明人 酒井 範夫;大坪 喜人
分类号 H05K3/46 主分类号 H05K3/46
代理机构 代理人
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