| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibrating structure gyroscope having such a configuration that a detection mass object is elastically separated from a drive mass object and the detection mass object does not cause displacement equivalent to the driving displacement by driving vibration of the drive mass object, and having means for offsetting displacement of the detection mass object generated by structural asymmetry caused by manufacturing variation. <P>SOLUTION: A first interdigital correction electrode 50 and a second interdigital correction electrode 52 are fixedly disposed on a substrate 2 in the third quadrant and the fourth quadrant on an X-Y plane with their facing an interdigital electrode 44 of a detection mass object 14 respectively. An AC voltage is applied to the first interdigital correction electrode 50 and the second interdigital correction electrode 52 to generate electrostatic attractive force, so that leakage rotational displacement that is generated when an angular velocity input is zero, is offset. <P>COPYRIGHT: (C)2013,JPO&INPIT |
