摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibrator that is small and short and has a low CI value, and to provide means for improving yields when mounted on a package. <P>SOLUTION: A piezoelectric vibration element includes: a piezoelectric substrate 10; excitation electrodes 20 that are arranged in vibration regions 14 on both main surfaces of the piezoelectric substrate 10 so as to face each other; lead-out electrodes 22; and pads 24 that are arranged on corners. The piezoelectric substrate 10 has: an excitation portion 14 positioned in the center thereof; and a peripheral portion 12 that is thinner than the excitation portion 14 and is formed around the excitation portion 14. All side surfaces of the excitation portion 14 have respective bumps in a thickness direction. At least one projection 11 that is perpendicular to a direction of the main surfaces of the piezoelectric substrate 10 is provided on both of the main surfaces in a range where vibration displacement is sufficiently damped when the piezoelectric vibration element is excited. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |