| 发明名称 |
Reduced striae extreme ultraviolet elements |
| 摘要 |
<p>Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements and extreme ultraviolet elements are also disclosed.</p> |
| 申请公布号 |
EP2211232(B1) |
申请公布日期 |
2015.09.02 |
| 申请号 |
EP20100157436 |
申请日期 |
2003.03.04 |
| 申请人 |
CORNING INCORPORATED |
发明人 |
HRDINA, KENNETH EDWARD;MAXON, JOHN E.;MCLEAN, BRENT R. |
| 分类号 |
G02B1/00;G03F1/24;C03B8/04;C03B19/14;C03B20/00;C03C3/06;C03C4/00;G01B11/16;G03F7/20;H01L21/027 |
主分类号 |
G02B1/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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