| 摘要 |
The objective of the present invention is to process a workpiece such as a hard brittle material and a difficult-to-cut material in an innovative way with precision, and to improve processing rate remarkably. A surface grinding method of the present invention rotates a grinding stone (3) at a low peripheral speed, when grinding the workpiece (W) by the cup type grinding stone (3), while supplying slurry (5) including abrasive grains. The peripheral speed of the grinding stone (3) is equal to or below 500 m/min, and desirably, 30 m/min to 430 m/min. Also, the slurry (5) is dropped or sprayed onto a grinding plane of the workpiece (W) at a flux equal to or below 4.0 ml/cm^2/h, and desirably, between 1.0 ml/cm^2/h to 2.0 ml/cm^2/h. |
