发明名称 PHOTOSENSITIVE RESIN COMPOSITION, AND CURED-PATTERN-FILM MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE USING SAID PHOTOSENSITIVE RESIN COMPOSITION
摘要 A resin composition containing the following components: (a) a polyimide precursor having a structural unit that can be represented by general formula (1) (in which A represents one of the tetravalent organic groups represented by formulas (2a) to (2d) and B represents a divalent organic group that can be represented by general formula (3)); (b) an oxime-ester compound; and (c) a solvent.
申请公布号 KR20150100622(A) 申请公布日期 2015.09.02
申请号 KR20157010929 申请日期 2013.12.13
申请人 HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD. 发明人 ENOMOTO TETSUYA;ONO KEISHI;OHE MASAYUKI;SUZUKI KEIKO;SOEJIMA KAZUYA;SUZUKI ETSUHARU
分类号 G03F7/031;C08F290/14;C08G73/10;G03F7/027 主分类号 G03F7/031
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