发明名称 |
PHOTOSENSITIVE RESIN COMPOSITION, AND CURED-PATTERN-FILM MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE USING SAID PHOTOSENSITIVE RESIN COMPOSITION |
摘要 |
A resin composition containing the following components: (a) a polyimide precursor having a structural unit that can be represented by general formula (1) (in which A represents one of the tetravalent organic groups represented by formulas (2a) to (2d) and B represents a divalent organic group that can be represented by general formula (3)); (b) an oxime-ester compound; and (c) a solvent. |
申请公布号 |
KR20150100622(A) |
申请公布日期 |
2015.09.02 |
申请号 |
KR20157010929 |
申请日期 |
2013.12.13 |
申请人 |
HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD. |
发明人 |
ENOMOTO TETSUYA;ONO KEISHI;OHE MASAYUKI;SUZUKI KEIKO;SOEJIMA KAZUYA;SUZUKI ETSUHARU |
分类号 |
G03F7/031;C08F290/14;C08G73/10;G03F7/027 |
主分类号 |
G03F7/031 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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