PREPARING METHOD OF ABRASION RESISTIBLE, HYDROPHOBIC AND OLEOPHOBIC COATING FILM, AND COATING FILM THEREBY

摘要

The present invention provides a preparing method of an abrasion resist, hydrophobic and oleophobic coated film and a coated film prepared by the same. The preparing method of an abrasion resistible, hydrophobic, and oleophobic coating film comprises: a step of forming a SiO_X thin film on a base material through PECVD using an organosilane precursor and oxygen; a step of forming a first hydrophobic thin film on the SiO_X film through PECVD using a organosilane precursor; and a step of forming a second oleophobic thin film on the first hydrophobic thin film through PECVD using a fluorocarbon-based gas precursor.