| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a light irradiation device which achieves a relatively high luminous efficiency of an ultraviolet light emitting element and a relatively long life of the ultraviolet light emitting element and reduces the size by efficiently cooling the ultraviolet light emitting element. <P>SOLUTION: A light irradiation module according to this invention includes: a light irradiation device; a cooling pipeline for flowing a refrigerant used for cooling the light irradiation device; and a housing that houses the light irradiation device and the cooling pipeline. The housing has a first space where the light irradiation device and a first cooling pipeline are housed and a second space where a second cooling pipeline is housed, and the first space is divided from the second space by a partition wall. Thus, the light irradiation device is cooled in a relatively efficient manner. As a result, the light irradiation module is realized which has relatively high light intensity and relatively small variations in the light intensity. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
