| 摘要 |
<p>A thermal detector includes a thermal detection element, a support member, and a fixing part supporting the support member. The support member mounts and supports the thermal detection element on a second side thereof with a first side thereof facing a cavity. The support member includes a first layer member disposed on the second side and having a residual stress in a first direction, and a second layer member laminated on the fist layer member on the first side and having a residual stress in a second direction opposite to the first direction. A thermal conductance of the first layer member is less than a thermal conductance of the second layer member.</p> |
