プラズマＣＶＤ装置,申请号JP20130266490-传众专利搜索

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发明名称	プラズマＣＶＤ装置
摘要
申请公布号	JP5772941(B2)	申请公布日期	2015.09.02
申请号	JP20130266490	申请日期	2013.12.25
申请人		发明人
分类号	H01L21/205;C23C16/509;H01L31/0747;H01L31/18	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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