| 摘要 |
A linear motor includes a stator, a mover that moves a subject to be moved linearly along the stator, and a multi-member spacer that is interposed between the mover and the subject to be moved. The stator includes a plurality of permanent magnets, the mover includes a plurality of coils arranged to be opposed to the permanent magnets, and the multi-member spacer includes two or more members different in thermal conductivity. |
