发明名称 |
PRINTING SLEEVE INCLUDING MELTABLE POLYMERIC CORD REINFORCING LAYER |
摘要 |
A nanowire device of the present description may be produced with the incorporation of at least one hardmask during the fabrication of at least one nanowire transistor in order to assist in protecting an uppermost channel nanowire from damage that may result from fabrication processes, such as those used in a replacement metal gate process and/or the nanowire release process. The use of at least one hardmask may result in a substantially damage free uppermost channel nanowire in a multi-stacked nanowire transistor, which may improve the uniformity of the channel nanowires and the reliability of the overall multi-stacked nanowire transistor. |
申请公布号 |
EP2911886(A1) |
申请公布日期 |
2015.09.02 |
申请号 |
EP20130716507 |
申请日期 |
2013.03.15 |
申请人 |
DAY INTERNATIONAL, INC. |
发明人 |
QUEEN, MARK;CZERNER, RICHARD;BRADLEY, CREG;BLENDER, DAVID |
分类号 |
B41N10/04 |
主分类号 |
B41N10/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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