发明名称 ゾーンプレートおよびそれを用いた照射装置
摘要 Although, conventionally, there were two methods, (1) a wave was transmitted through a spiral phase plate and (2) a diffraction grating containing an edge dislocation was used, they incurred complication of a configuration and securement of a larger amount of space and were not efficient because each of the spiral wave generation methods needed an incident wave to be a plane wave and at least one time of imaging is necessary at the time of wave irradiation on an observation object. In order to efficiently generate the spiral wave having a sufficient intensity, a structure of edge dislocation is taken in into a pattern of the zone plate and a spiral pattern containing a discontinuous zone is formed. Moreover, a thickness and a quality of material that change the phase of the wave by an odd multiple of &pgr; are selected for a material of the wave-blocking section in the pattern.
申请公布号 JP5771695(B2) 申请公布日期 2015.09.02
申请号 JP20130535628 申请日期 2011.09.28
申请人 株式会社日立製作所 发明人 原田 研;孝橋 照生
分类号 G21K1/06;G02B5/18;G21K1/00 主分类号 G21K1/06
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