发明名称 水平及び回転位置決め装置
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a compact and light-weight positioning device, capable of positioning by rotating with a rotation angle according to a movement amount difference of a mobile in a horizontal direction, without provision of a rotary drive mechanism. <P>SOLUTION: By synchronously driving each electric motor, feed screws 9, 11 thereof are rotated to a required direction, so that each horizontally movable body 17, 19 is moved to the horizontal direction with a coincident feed amount. A positioning means for a positioning target is positioned by the rotation of an attachment member 35 by fluctuating a pair of arms 37, 41 in parallel, according to a movement amount difference between each horizontally movable body 17, 19 in the horizontal direction. <P>COPYRIGHT: (C)2013,JPO&INPIT</p>
申请公布号 JP5773825(B2) 申请公布日期 2015.09.02
申请号 JP20110215039 申请日期 2011.09.29
申请人 发明人
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
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