| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin plate-shaped workpiece storage device configured to temporarily store a thin plate-shaped workpiece in non contact with the portions other than both side edge parts of the thin plate-shaped workpiece in the conveying direction on the way of a conveyance line.SOLUTION: The thin plate-shaped workpiece storage device includes: a workpiece storage cassette 3 including a plurality of trays 31 provided vertically for supporting glass substrates W, and configured to store the plurality of glass substrates W spaced away from one another in a layered state; a cassette lifting mechanism 5; and driving rollers 6 configured to apply the moving force to the glass substrates W so as to be conveyed to/from the trays 31 of the workpiece storage cassette 3. The trays 31 are arranged opposite to one another in the direction perpendicular to the conveyance direction to/from the glass substrate W, and each tray 31 includes a plurality of pairs of rollers 32 and 32, which rotate in contact with both side edges Ws of the glass substrate W while keeping the upwardly curved state of the glass substrate W, in the conveyance direction to/from the glass substrate W. |
