Three-dimensional microbattery having a porous silicon anode

摘要

An electrical energy storage device (20) includes a silicon substrate (22), which is formed so as to define a multiplicity of micro-containers (24, 26) having porous silicon walls (28), which are configured to serve as an anode layer. A cathode layer (34) overlies the micro-containers, with a separator layer (32) intermediate the anode layer and the cathode layer.

主权项

1. An electrical energy storage device, comprising:
a silicon substrate, which has opposing first and second surfaces and is formed so as to define a multiplicity of micro-containers having porous silicon walls, which are configured to serve as an anode layer, the multiplicity of the micro-containers comprising first and second sets of the micro-containers, which are respectively formed in the opposing, first and second surfaces of the substrate in an interlaced pattern, in which the micro-containers in the first set are interdigitated with neighboring micro-containers in the second set; a cathode layer overlying and extending into only the first set of the micro-containers; and a separator layer extending into only the first set of the micro-containers, intermediate the anode layer and the cathode layer.