Imprint apparatus and method of manufacturing article

摘要

An imprint apparatus which cures a resin dispensed on a substrate while the resin and a pattern surface of a mold are in contact with each other, comprises a supply portion configured to supply a gas, used to accelerate filling of a concave portion of the pattern surface of the mold with the resin, to a space which the pattern surface of the mold faces, and a controller configured to control the supply portion to supply the gas to the space before the resin and the pattern surface of the mold are brought into contact with each other, wherein the supply portion is configured to supply the gas to the space via a porous portion formed in at least part of the mold.

主权项

1. An imprint apparatus which cures a resin dispensed on a substrate while the resin and a pattern surface of a mold are in contact with each other, the mold having a lower surface, an upper surface, and a side surface connecting an outer edge of the lower surface and an outer edge of the upper surface, and the mold including a porous portion exposed to the side surface of the mold, the apparatus comprising:
a supply portion configured to communicate only with the side surface of the mold to which the porous portion is exposed, to supply a gas only to the porous portion such that the gas passes through the porous portion and is exhausted to a space which the pattern surface of the mold faces; and a controller configured to control the supply portion to supply the gas to the space before the resin and the pattern surface of the mold are brought into contact with each other.