用于活化工件上之异原子的方法及设备,申请号TW103143819-传众专利搜索

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发明名称	用于活化工件上之异原子的方法及设备
摘要	本发明系关于一种用于活化工件(18)上之异原子之方法，以一第一波长之脉冲第一雷射光束(4)及具有一与此重叠之第二波长之脉冲第二雷射光束(8)进行活化，其中第一雷射光束(4)之脉冲长度(t1)长于第二雷射光束(8)之脉冲长度(t2)，且第二雷射光束(8)之脉冲(P)在时间上在第一雷射光束(4)之脉冲(P)内照射在工件(18)上。此外，本发明亦系关于一种实施该方法之设备。
申请公布号	TW201532722	申请公布日期	2015.09.01
申请号	TW103143819	申请日期	2014.12.16
申请人	罗芬激光技术股份有限公司 ROFIN-BAASEL LASERTECH GMBH & CO. KG	发明人	迈尔霍夫　罗兰 MAYERHOFER, ROLAND;史密特　拉弗 SCHMIDT, RALF;利兹亚斯　拉弗 LIZIUS, RALF;奥斯特林　彼得 OESTERLIN, PETER
分类号	B23K26/06(2014.01)	主分类号	B23K26/06(2014.01)
代理机构		代理人	王彦评赖碧宏
主权项
地址	德国 DE

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