树脂组成物、由其形成的硬化膜及图案硬化膜、它们的制造方法以及电子零件;RESIN COMPOSITION, CURED FILM AND PATTERN CURED FILM FORMED BY THE SAME, PRODUCTION METHOD THEREOF AND ELECTRONIC COMPONENT

摘要

本发明提供一种树脂组成物，其含有下述(a)成分、(b)成分及(c)成分。(a)具有下述式(1)所表示的结构单元的聚醯亚胺前驱物；(b)曝光部表面可溶化剂；以及(c)藉由光化射线照射而产生自由基的化合物(式(1)中，R 1 为4价有机基，R 2 为2价有机基，R 3 及R 4 分别独立地为氢原子、烷基、环烷基、或者具有碳碳不饱和双键的1价有机基)。;A resin composition is provided, which contains following component (a), component (b) and component (c). (a) a polyimide precursor having a structure unit represented by formula (1) below; (b) a solubilizing agent of an exposure section surface; and (c) a compound which generates a radical by irradiation of an actinic ray. (In the formula (1), R 1 is an organic tetravalent group; R2 is an organic divalent group; R3 and R4 are respectively independently a hydrogen atom, an alkyl group, a cyclic alkyl group or an organic monovalent group having a carbon-carbon unsaturated double bond.