Dielectric layer for electrostatic chuck and electrostatic chuck

摘要

A dielectric layer for an electrostatic chuck is formed of a ceramic material having a first phase including aluminum oxide and a second phase including composite carbonitride (Ti, Me)(C, N) that contains titanium as fine grains. The Me represents a transition element and metals of Group 4 to Group 6 such as Mo and W. The ceramic material that includes the second phase by 0.05 vol % to 2.5 vol % has a volume resistivity value of about 108 to 1013 (Ω·cm) necessary for a Johnsen-Rahbek type electrostatic chuck.

主权项

1. A dielectric layer for an electrostatic chuck comprising:
a ceramic material that includes an aluminum oxide, wherein
in a first phase of the aluminum oxide, a second phase is dispersed;the second phase comprises composite carbonitride of Ti and an Me expressed by (Ti, Me)(C, N); whereinthe Me comprises one or more of transition elements of Group 3 to Group 11 of the periodic table;a volume ratio of the second phase being in a range of 0.05% to 2.5% by volume.