| 摘要 |
抑制研磨期间研磨盘中所产生之热的增加。;依据一态样的接垫为一支撑一研磨盘之接垫，该接垫系藉由与该研磨盘一起被固定于一研磨机之一轴杆以支撑该研磨盘，该接垫包括一对向于该研磨盘之支撑表面、一对向于该支撑表面之背表面、以及复数个沿该支撑表面之圆周方向以一预定间隔形成的气道。该等气道之各者的至少一部分从该支撑表面穿透至该背表面。该等气道之各者系形成至该支撑表面之周缘部分。;The pad according to one aspect is a pad supporting a grinding disk by being affixed to a shaft of a grinding machine together with the grinding disk, the pad including a support surface opposing the grinding disk, a back surface opposing the support surface, and a plurality of air passages formed at a predetermined spacing along the circumferential direction of the support surface. At least a portion of each of the air passages penetrates from the support surface to the back surface. Each of the air passages is formed to the peripheral portion of the support surface. |
