Potential measuring device

摘要

There is provided a potential measuring device of non-contact type which can improve measurement sensitivity. A potential measuring device which measures a charged object in a non-contact manner with a sensor includes: a first shutter and a second shutter each having a shutter part provided with an opening and a leaf spring part; a magnet attached to the leaf spring part of each of the first shutter and the second shutter; a yoke on which a coil is disposed, the coil applying an alternating magnetic field to the magnet of each of the first shutter and the second shutter to cause the shutter part to reciprocate via the leaf spring part; and a natural frequency adjusting means for adjusting a natural frequency of at least one of a first shutter system including the first shutter and the magnet and a second shutter system including the second shutter and the magnet.

主权项

1. A potential measuring device which measures a surface potential of a charged object in a non-contact manner with a sensor disposed to oppose the charged object, the device comprising:
a first shutter and a second shutter each having a shutter part, which is disposed between the charged object and the sensor and has an opening, and a leaf spring part extending from the shutter parts; a magnet attached to the leaf spring part of each of the first shutter and the second shutter; a yoke on which a coil is disposed, the coil applying an alternating magnetic field to the magnet of each of the first shutter and the second shutter to cause the shutter part to reciprocate via the leaf spring part; and a natural frequency adjusting means for adjusting a natural frequency of at least one of a first shutter system comprising the first shutter and the magnet attached to the first shutter and a second shutter system comprising the second shutter and the magnet attached to the second shutter.