Production of trisilylamine from monochlorosilane and ammonia by use of inert solvent

摘要

The present invention relates to a specific process for producing trisilylamine from monochlorosilane and ammonia in the liquid phase. The invention further relates to a plant wherein such a process can be carried out with advantage.

主权项

1. Process for production of trisilylamine in the liquid phase,
which process comprises initially charging monochlorosilane (A or A′) to a reactor (1) in the liquid form of a solution in a solvent (H), wherein the solvent is inert with regard to monochlorosilane, ammonia as well as TSA and has a higher boiling point than TSA has, and passing ammonia (B) into the reactor in the form of a solution in the solvent (H), performing the reaction in reactor (1), subsequently passing the resultant product mixture from reactor (1) into and through a filter unit (2) and removing solid ammonium chloride (C) from the product mixture, and passing the filtrate from the filter unit (2) into the distillation column (3), excess monochlorosilane (A′) being distilled in distillation column (3) overhead, condensed and fed to reactor (1) in liquid form under admixture of the solvent, and also removing gaseous substances (D) from the distillation column (3) overhead, and conveying the bottoms (E) into the distillation column (4), the product trisilylamine (G) being distilled in the distillation column (4) overhead and condensed, and conveying the bottoms (F) into the distillation column (5), the solvent (H) being distilled in distillation column (5) overhead, condensed and returned to the reactor feedstreams (A), (A′), (B) as a solvent, and exporting higher boilers via the bottoms (I).