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发明名称
藉由空间局限磊晶法生长III-V族材料层
摘要
申请公布号
TWI499085
申请公布日期
2015.09.01
申请号
TW100106026
申请日期
2011.02.23
申请人
应用材料股份有限公司
发明人
苏杰;克瑞劳可欧嘉
分类号
H01L33/30
主分类号
H01L33/30
代理机构
代理人
蔡坤财 台北市中山区松江路148号11楼;李世章 台北市中山区松江路148号11楼
主权项
一种于一基板上制造一III-V族材料的方法，该方法包括：提供一已图案化基板，该已图案化基板上具有复数个柱体的不连续区块；以及在该已图案化基板上形成一III-V族材料，且该III-V族材料在每个不连续区块的该些柱体之间与该些柱体上为连续，但在该些不连续区块之间为不连续，以形成该III-V族材料的空间局限磊晶区域。
地址
美国
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