PRESSURE MODULE AND APPARATUS FOR STRETCHING SUBSTRATE

摘要

A pressurization module and an apparatus for stretching a substrate are disclosed. The pressurization module stretching a substrate comprises: a pressurization rod downwardly moving in a vertical direction of an upper surface of the substrate to provide a vertical pressurization force; a pressurization end receiving the vertical pressurization force and distributing the vertical pressurization force into a vertical component force with respect to the substrate and a horizontal component force directed at outer end portion of the substrate; and a plate spring provided on an upper surface of the pressurization end to provide an elastic force in a direction opposite to the vertical pressurization force.