| 摘要 |
<p>The present invention provides method for manufacturing wearable thermoelectric modules for self-power generation. It includes a step of coating a sacrificial layer in the upper part of a substrate, a step of forming a lower electrode layer in the upper part of the sacrificial layer, a step of forming a polymer layer on the substrate having the lower electrode, a step of firstly patterning the polymer layer to be separated to form a first thermal conduction material, a step of depositing the first thermal conduction material between the firstly patterned polymer layers, a step of secondarily patterning the firstly patterned polymer layer to be separated to form a second thermal conduction material, a step of depositing the second thermal conduction material between the secondarily patterned polymer layer, a step of forming an upper electrode layer in the polymer layer, the first thermal conduction material and the upper part of the second thermal conduction material, and a step of forming upper electrodes which are separated by patterning the upper electrode layer.</p> |
