| 摘要 |
<p>The purpose of the present invention is to enable a position deviation correction of a substrate with respect to a substrate holder when the substrate is held by the substrate holder. A substrate processing apparatus comprises: a first storage and a second storage (14B, 1420) where the substrate (W) can be disposed; the substrate holder (137) holding the substrate; a substrate transfer device (13) transferring the substrate between at least the first storage and the second storage; and a substrate position detection unit (1413) detecting a position of the substrate held by the substrate holder. The substrate position detection unit is disposed on the position independent from the substrate transfer device (13). Moreover, the substrate position detection unit is installed in the position capable of transferring the substrate held by the substrate holder of the substrate transfer device.</p> |
