摘要 |
<p>A seed retaining member has a recessed portion for breaking and separating formed at an arbitrary location and thereby allows stress concentration to occur at the recessed portion when applying a breaking load, to enable the seed retaining member to break with a smaller load than conventional. A seed retaining member and method of manufacturing polycrystalline silicon using the seed retaining member are provided, that can prevent a crack from propagating in an unintended location in the seed retaining member by allowing the crack to propagate along the recessed portion, and can reduce a workload in a separation work of the seed retaining member and polycrystalline silicon. A seed retaining member (6) for retaining a lower end portion of a seed (4) serving as a seed rod is made of graphite and disposed at a bottom portion of a furnace for producing polycrystalline silicon by a Siemens method. A groove (16) for breaking and separating is formed in an outer peripheral surface of the seed retaining member (6). The seed retaining member (6) has a columnar base portion (6a) having a first fitting hole (10) for inserting an electrode portion (5), a cylindrical body portion (6b) having a smaller diameter than the base portion (6a), and a conical frustum-shaped tip portion (6c) joined to the body portion (6b) and having a second fitting hole (13) for inserting a lower end portion of the seed (4).</p> |