STATOR-SIDE MEMBER AND VACUUM PUMP

摘要

The invention provides a stator-side member which is arranged in a vacuum pump and which, without the provision of a heat insulation material, prevents the deposition of products at the lower side of a threaded groove pump unit, with this lower side being an area of high pressure where the deposition of products (deposits) occurs easily, and also provides a vacuum pump equipped with this stator-side member. A threaded groove spacer configured to have a coefficient of thermal conductivity lower than a predetermined value is arranged in a vacuum pump equipped with a threaded groove pump unit. (1) The threaded groove spacer is manufactured from a material having a coefficient of thermal conductivity lower than that of a member which opposes or comes into contact with the threaded groove spacer. Specifically, this material has a coefficient of thermal conductivity lower than that of aluminum or aluminum alloy, and is preferably any one of stainless steel, fiber-reinforced plastic, polyetherimide, and polyetheretherketone. (2) The threaded groove spacer is constituted by at least two or more parts.

主权项

1. A stator-side member used in a first gas transfer mechanism of a vacuum pump, the stator-side member comprising:
a casing in which an inlet port and an outlet port are formed; a stator portion that is arranged inside the casing; a rotating shaft that is contained in the casing and pivotally supported in a rotatable manner; and a rotating body that is fixed to the rotating shaft, wherein the stator-side member is manufactured from a first member having a coefficient of thermal conductivity lower than that of a second member, which comes into contact with the stator-side member, out of the casing and the stator portion.