FUNCTIONAL ELEMENT, ELECTRONIC APPARATUS, AND MOVING OBJECT

摘要

A functional element includes: a substrate; a movable body that includes a movable electrode portion; a support portion that supports the movable body; a first fixed electrode portion that is disposed on the substrate and a portion of which faces a first portion as one of portions of the movable body; a second fixed electrode portion that is disposed on the substrate and a portion of which faces a second portion as the other portion of the movable body; and a third fixed electrode portion that is disposed on the substrate and a portion of which faces the first portion. An opening that faces a region of the substrate between the first fixed electrode portion and the third fixed electrode portion is provided in the movable body, and the width of the opening is equal to or more than the width of the region.

主权项

1. A functional element comprising:
a substrate; a movable body that includes a movable electrode portion; a support portion that supports the movable body so as to be displaceable about a first axis; a first fixed electrode portion that is disposed on the substrate and at least a portion of which faces a first portion as one of portions of the movable body divided by the first axis as a boundary; a second fixed electrode portion that is disposed on the substrate and at least a portion of which faces a second portion as the other portion of the movable body divided by the first axis as a boundary; and a third fixed electrode portion that is disposed on the substrate and at least a portion of which faces the first portion, wherein the first fixed electrode portion is disposed between the second fixed electrode portion and the third fixed electrode portion in a plan view, an opening that faces a region of the substrate between the first fixed electrode portion and the third fixed electrode portion is provided in the movable body, and the width of the opening is equal to or more than the width of the region.